AOI - 6 Inch / 8 Inch / Wafer

Product Variants-

  1. Fully Auto Machine


  • Wafer Cassette Input Output Modules
  • Robotic Wafer Handling with strong End Effector
  • High Resolution Optical Inspection for surface and edge defects
  • Optional Infrared Imaging for internal defects detection
  • High Speed X-Y-Theta table made of Linear Servo Motors
  • Powered by High End Industrial Computer and user friendly GUI
  • Communicative for upstream and downstream information passage
  • Compact and Robust Machine structure