AOI - 6 Inch / 8 Inch / Wafer
Product Variants-
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Fully Auto Machine
USP-
- Wafer Cassette Input Output Modules
- Robotic Wafer Handling with strong End Effector
- High Resolution Optical Inspection for surface and edge defects
- Optional Infrared Imaging for internal defects detection
- High Speed X-Y-Theta table made of Linear Servo Motors
- Powered by High End Industrial Computer and user friendly GUI
- Communicative for upstream and downstream information passage
- Compact and Robust Machine structure